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Olympus OLS5100 Laser Confocal Microscopes

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

Phone:+86-21-54286005

Resources

OLS5100_Brochure_CN
OLS5100_Brochure_EN

LEXT™ OLS5100 3D Laser Scanning Microscope

Laser Microscope for Material Analysis

LEXT™ OLS5100 3D激光扫描显微镜

Smart Workflow, Faster Experiments

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

 

Easier Material Engineering and Failure Analysis Experiments

The Smart Experiment Manager makes your submicron 3D observation and failure analysis experiment workflows simpler by automating previously time-consuming tasks.

  • Automatically creates your experiment plan
  • Autopopulates data to your experiment plan matrix, reducing the chance of input errors
  • Clear data trend visualization tools

 

Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

  • Guaranteed measurement accuracy*
  • Renowned Olympus optics reduce aberration to capture the correct shape of your sample throughout the entire field of view
  • Smart Lens Advisor helps you choose the right objective lens for your roughness measurement

*The information, including guaranteed accuracy, on this web page is based on conditions set by Olympus.

LEXT microscope objectives

 

Easy Laser Scanning Microscopy

Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.

  • Acquire accurate data easily—put your sample on the stage and press the start button
  • Measurement performance guarantee tailored to your operating environment

 

Service and Support You Can Trust

From calibration to training, we offer a broad portfolio of services to help you maintain optimal device performance. Evident service contracts are:

  • Straightforward—so you can focus on the core of your business
  • Efficient—we can schedule preventative maintenance, including calibrations, on your behalf
  • Cost-effective—providing you savings throughout the life of the contract

Service and Support You Can Trust

 

Simple Material Engineering and Failure Analysis Experiment Management

Managing experiment conditions when testing new materials is complicated, so the OLS5100 laser microscope’s Smart Experiment Manager simplifies the process by automating key steps, such as creating the experiment plan.

  • Complete your measurement tasks up to 30% faster*
  • Scan plan is autopopulated with data as it’s acquired
  • Don’t waste time transcribing data—the software does it for you

*Compared with OLS5000

Simple Material Engineering and Failure Analysis Experiment Management

 

Automatic Data Input

The software automatically adds values to your experiment plan matrix to minimize the chance of input errors. In just a couple of clicks, you can export your data to an Excel spreadsheet.

Automatic Data Input

 

Easy Experiment Condition Data Organization

You can click on each cell in the experiment plan, and the software will automatically generate a file name that contains the evaluation conditions for easy record keeping. Each file contains the associated images and data.

Easy Experiment Condition Data Organization

 

Comprehensive Data Capture

The microscope scans your sample according to the experiment plan generated by the software so you know you’re not missing data or redoing work.

Comprehensive Data Capture

 

Find Data Problems Easily

A color map helps you understand your experiment data and verify that no data are missing and there are no errors. If there’s a problem, you can find and fix it earlier in the process.

Find Data Problems Easily

 

Choose the Right Objective Lens

The Smart Lens Advisor helps you choose the right objective lens for your surface roughness measurement application. Enter some basic information—such as the field of view and the lens you want to use—and the Advisor will tell you how suitable it is for the application.

Choose the Right Objective Lens

 

Easy Data Acquisition

Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.

Easy Data Acquisition

 

 

Main unit

Model OLS5100-SAF OLS5100-SMF OLS5100-LAF OLS5100-EAF
Total magnification

54x–17,280x

Field of view

16 µm–5,120 µm

Measurement principle Optical system Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Color
Color-DIC
  Light receiving element Laser: Photomultiplier (2 channels)
Color: CMOS color camera
Height measurement Display resolution 0.5 nm
  Dynamic range 16 bits
  Repeatability σn-1*1 *2 *5 5X: 0.45 μm, 10X: 0.1 μm, 20X: 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm
  Accuracy *1 *3 *5 0.15+L/100 μm (L:Measuring length[μm])
  Accuracy for stitched image *1 *3 *5 10X: 5.0+L/100 μm, 20X or higher: 1.0+L/100 μm (L: Stitching length [μm])
  Measurement noise (Sq noise) *1 *4 *5 1 nm (Type)
Width measurement Display resolution 1 nm
  Repeatability 3σn-1  *1 *2 *5 

5X: 0.4 μm, 10X: 0.2 μm, 20X: 0.05 μm, 50X: 0.04 μm, 100X: 0.02 μm

  Accuracy *1 *3 *5 Measurement value +/- 1.5%
  Accuracy for stitched image *1 *3 *5 10X: 24+0.5L μm, 20X: 15+0.5L μm, 50X: 9+0.5L μm, 100X: 7+0.5L μm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement

4096 × 4096 pixels

Maximum number of measuring points

36-megapixels

XY stage configuration Length measurement module NA NA
  Operating range

100 × 100 mm (3.9 × 3.9 in.) Motorized

100 × 100 mm (3.9 × 3.9 in.) Manual

300 × 300 mm (11.8 × 11.8 in.) Motorized

100 × 100 mm (3.9 × 3.9 in.) Motorized

Maximum sample height

100 × 100 mm (3.9 × 3.9 in.)

30 mm (1.2 in.)

30 mm (1.2 in.)

210 mm (8.3 in.)

Laser light source Wavelength 405 nm
  Maximum output 0.95 mW
  Laser class Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source White LED
Electrical power 240 W 240 W 278 W 240 W
Mass Microscope body Approx. 31 kg (68.3 lb) Approx. 32 kg (70.5 lb) Approx. 50 kg (110.2 lb) Approx. 43 kg (94.8 lb)
  Control box Approx. 12 kg (26.5 lb)

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.

** The OS license of Window 10 has been certified for the microscope controller provided by olympus. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm

 


Objectives

Series Model Numerical Aperture (NA) Working Distance (WD) (mm)
UIS2 objective lens MPLFLN2.5x 0.08 10.7
MPLFLN5x 0.15 20
Dedicated LEXT objective lens (10X) MPLFLN10xLEXT 0.3 10.4
Dedicated LEXT objective lens (high-performance type) MPLAPON20xLEXT 0.6 1
MPLAPON50xLEXT 0.95 0.35
MPLAPON100xLEXT 0.95 0.35
Dedicated LEXT objective lens (long working distance type) LMPLFLN20xLEXT 0.45 6.5
LMPLFLN50xLEXT 0.6 5.2
LMPLFLN100xLEXT 0.8 3.4
Super long working distance lens SLMPLN20x 0.25 25
SLMPLN50x 0.35 18
SLMPLN100x 0.6 7.6
Long working distance for LCD lens LCPLFLN20xLCD 0.45 8.3-7.4
LCPLFLN50xLCD 0.7 3.0-2.2
LCPLFLN100xLCD 0.85 1.2-0.9

Application software

Standard software OLS51-BSW
  Data acquisition app Analysis app (simple analysis)
Motorized stage package application*1 OLS50-S-MSP
Advanced analysis application*2 OLS50-S-AA
Film thickness measurement application OLS50-S-FT
Auto edge measurement application OLS50-S-ED
Particle analysis application OLS50-S-PA
Experimental total assist application OLS51-S-ETA 
Sphere/cylinder surface angle analysis application OLS50-S-SA 

*1 Including auto-stitching data acquisition and multi-area data acquisition functions.
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis and Histogram analysis.

 


Olympus Laser Microscopes

OLS5000-SAF Setup Example

OLS5100-SAF Setup Example

OLS5100-SAF

  • 100 mm motorized stage
  • Max. height of sample: 100 mm (3.9 in.)

OLS5000-SAF

OLS5000-SAF - Dimention

OLS5100-EAF

  • 100 mm motorized stage
  • Max. height of sample: 210 mm (8.3 in.)

OLS5000-EAF

OLS5000-EAF - Dimention

OLS5100-SMF

  • 100 mm motorized stage
  • Max. height of sample: 40 mm (1.6 in.)

OLS5000-SMF

OLS5000-SMF - Dimention

 

OLS5100-LAF

  • 300 mm motorized stage
  • Max. height of sample: 37 mm (1.5 in.)

OLS5000-LAF

OLS5000-LAF  - Dimention

 

Control unit

PC计算机和控制单元-尺寸

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