Olympus STM7 - Measuring Microscopes

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Olympus STM7 Measuring Microscopes

Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

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Overview Specifications Dimensions

A Microscope that Measures Up to Individual Needs

Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

STM7

Refined Optical Performance

The STM7 series uses the same UIS2 infinity-corrected optical system found in state-of-the-art optical microscopes.
As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

Reliable Measurements with a Stone Stage-Mounting Plate

To further improve measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. This stability enables sub-micron level measurements with minimal error.

STM7-LF FEM analysis

User-Friendly, High-Precision, 3-Axis Measurement

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the XY axis, but also along the Z-axis. Olympus responded by creating the first reflective active, confocal autofocus system.

3轴测量

Reliable Modular Systems

Five configurations provide you with flexibility to choose the features that you need.

Manual Models			Motorized Models

STM7-SF	STM7-MF	STM7-LF	STM7-MFA	STM7-LFA

STM7-CS100 ^Stage^{：100 mm x 100 mm}	STM7-CS200 ^Stage^{：200 mm x 200 mm}	STM7-CS300 ^Stage^{：300 mm x 300 mm}	STM7-CS200 ^Stage^{：200 mm x 200 mm}	STM7-CS300 ^Stage^{：300 mm x 300 mm}

	STM7-SF	STM7-MF	STM7-LF	STM7-MFA	STM7-LFA
Z-axis focus	Manual		Manual	Motorized
Standard	BF or BF/DF		BF or BF/DF	BF or BF/DF
Option	DIC/POL		DIC/POL	DIC/POL
_{Measurement objectives} Brightfield
_{Focus navigator} STM7-FN
_{Autofocus unit} STM7-AF	－		－
_{Measurement support software} STM7-BSW
_{Measurement support software} ^{(Multiple Image Alignment /MIA} ^{and extend Focus Image/EFI)} STM7-ASW-ME

OBSERVATION METHOD

BF: Brightfield
DF: Darkfield
DIC: Differential interference contrast
POL: Polarized light

Option : Option

Stages that Fit Your Samples

Common Problems

Short measurement stroke precludes the measurement of larger samples•Samples must be rotated because the X-axis measurement area is shorter than the Y-axis measurement area
Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage to measure them at the same time

STM7 Solutions

The STM7 features a 300 mm x 300 mm stage capable of measuring large samples, including 300 mm wafers and printed circuit boards.
The X- and Y-axis measurement areas are equally long, eliminating the need to rotate samples
Long measurement areas for both the X and Y-axis allow multiple samples to be lined up on the stage for more efficient measurement

Maximum Measurement Stroke 300 mm x 300 mm

Three stages are available, each with a different measurement stroke - 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm. Whether your samples are large or small, we offer a stage that fits your application.

STM7-CS100

_STM7-CS100
^{100 mm x 100 mm}

STM7-CS200

_STM7-CS200
^{200 mm x 200 mm}

STM7-CS300

_STM7-CS300
^{300 mm x 300 mm}

Broad Range of Magnifications and Working Distances

Common Problems

Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, limiting the observation options

STM7 Solutions

The STM7 meets the requirements of a wide variety of observations. It responds to your needs at both low and high magnifications, enables the measurement of uneven samples requiring ultra-long working distance objectives, and even offers a variety of observation methods

Measuring Objectives

The objectives’ very long working distance helps you be confident when focusing on samples with large peaks and troughs and minimizes the chance that the objective comes in contact with the sample.

Furthermore, their low-magnification capability enables wide areas to be observed in a single view.

Measuring Objectives

Metallurgical Objectives

Metallurgical objectives enable high-magnification, high resolution observation comparable to that of optical microscopes.

What’s more, these objectives can be used for brightfield, darkfield, and DIC observation.

Brightfield image Darkfield image

Revolutionary Control Unit Refines Usability

Common Problems

Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency
Numerous operational units and their power supplies around the main unit occupy valuable working space

STM7 Solutions

Almost all measuring microscope operations can be efficiently completed on the nearest operational unit
The system requires only a single operational unit and power supply, regardless of how many functions are added, freeing up workspace

Controllers

With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one han

SPECIFICATIONS OF STM7 (Manual Model)

			Manual Model
			Small stage	Midsize stage	Large stage
Microscope body			STM7-SF	STM7-MF	STM7-LF
	Focus	Vertical movement range	175 mm		145 mm
		Maximum measurable height	120 mm (with measurement objective) 175 mm (with metallurgical objective)		90 mm (with measurement objective) 145 mm (with metallurgical objective) *1
		Z-axis measurement resolution	0.1 um
		Z-axis drive method	Manual coaxial fine/coarse focusing knobs
	Illumination	LED illumination	White: for reflected light illumination, green: for transmitted light illumination
Observation tube			MM6-ETR Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22)			MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives	BF (Bright field)		MM6C-KMAS Illumination
			U-5RES-ESD Nosepiece
			MPLFL5X,10X,LMPLFLN20X,50X,100X Metallurgical objectives
	BF (Brightfiels) /DF (Darkfield)		MM6C-RLAS Illumination
			U-D5BDRES-ESD Nosepiece
			LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD Metallurgical objectives
LED unit	White color (Reflected)		MM6-ILW
	Green color (Transmitted)		MM6-ILG
Stage			STM7-CS100	STM7-CS200	STM7-CS300
	Measuring range		X-axis 100 mm, Y-axis 100 mm	X-axis 200 mm, Y-axis 200 mm	X-axis 300 mm, Y-axis 300 mm
	Measurement accuracy (L: measuring length)		(3+2L/100) μm	(3+4L/200) μm	(3+6L/300) μm
	Accuracy assurance weight		6 kg	10 kg	15 kg
Counter			STM7-DI
	Number of axes		Three
	Unit		μm / mm / inch / mil
	Minimum resolution		0.1 um
	Control box		STM7-CB
	Hand switch		STM7-HS
	Focus controller		－
	Interface cable		－
Anti-vibration plates			－	STM7-VI
Power cable			UYCP
Dimensions (W x D x H) mm			466 x 583 x 651	606 x 762 x 651	804 x 1024 x 686
Weight (kg)			84 kg	152 kg	277 kg
Power consumption			100-120/220-240V - 50/60Hz 0.3A/0.2A	100-120/220-240V - 50/60Hz 0.3A/0.2A	100-120/220-240V - 50/60Hz 0.3A/0.2A

*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.

OBJECTIVES WORKING DISTANCE

Objective			1X	3X	5X	10X	20X	50X	100X
Measuring objectives	MM6-OB series		59.6	76.8	65.4	50.5	－	－	－
Metallurgical objectives	MPLFLN series	Brightfield	－	－	20.0	11.0	3.1	1.0	1.0
	LMPLFLN series	Long working distance	－	－	22.5	21.0	12.0	10.6	3.4
	MPLFLN-BD series	Brightfield/darkfield	－	－	12.0	6.5	3.0	1.0	1.0
	LMPLFLN-BD series	Brightfield/darkfield, long working distance	－	－	15.0	10.0	12.0	10.6	3.3

STM7-BSW SYSTEM REQUIREMENTS

Item
CPU	Intel Core i3 Processors 3 GHz or more with an STM7-CU camera, an Intel Core i5 or equivalent or higher is required with DP23/DP28 cameras
Memory	4 GB or more with an STM7-CU camera, whereas 8 GB is required and 16 GB is recommended with DP23/DP28 cameras
HD available space	100 GB or more hard disk space for installation SSD hard disk is recommended for high speed image acquisition
Graphic card	Graphic card available for resolution 1980 x 1080 and 32 bit color
Drive	DVD Drive
PC input device	2-button mouse (3-button mouse with a wheel is recommended), keyboard
Operating system	Microsoft Windows 10 Pro/Pro for Workstations (64 bit)
Web browser	Internet Explorer 11

* Microsoft Office 32 bit and 64 bit 2013/2016/2019/2021/365 (SAC) are also supported.

SPECIFICATIONS OF STM7 (Motorized Model)

			Motorized Model
			Midsize stage	Large stage
Microscope body			STM7-MFA	STM7-LFA
	Focus	Vertical movement range	175 mm	145 mm
		Maximum measurable height	120 mm (with measurement objective) 175 mm (with metallurgical objective)	90 mm (with measurement objective) 145 mm (with metallurgical objective) *1
		Z-axis measurement resolution	0.1 um
		Z-axis drive method	Motorized FOCUS button: Coarse movement speed 8 mm/s (max.) Fine/coarse focusing knob: Fine focusing speed can be selected from 4 values (800 μm, 400 μm, 100 μm, 50 μm)
	Illumination	LED illumination	White: for reflected light illumination, green: for transmitted light illumination
Observation tube			MM6-ETR Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22)			MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives	BF (Bright field)		MM6C-KMAS Illumination
			U-5RES-ESD Nosepiece
			MPLFL5X,10X,LMPLFLN20X,50X,100X Metallurgical objectives
	BF (Brightfield) /DF (Darkfield)		MM6C-RLAS Illumination
			U-D5BDRES-ESD Nosepiece
			LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD Metallurgical objectives
LED unit	White color (reflected)		MM6-ILW
	Green color (Transmitted)		MM6-ILG
Stage			STM7-CS200	STM7-CS300
	Measuring range		X-axis 200 mm, Y-axis 200 mm	X-axis 300 mm, Y-axis 300 mm
	Measurement accuracy (L: measuring length)		(3+4L/200) μm	(3+6L/300) μm
	Accuracy assurance weight		10 kg	15 kg
Counter			STM7-DI
	Number of axes		Three
	Unit		μm / mm / inch / mil
	Minimum resolution		0.1 um
	Control box		STM7-CBA
	Hand switch		－
	Focus controller		STM7-MCZ
	Interface cable		U-IFCBL200	U-IFCBL200
Anti-vibration plates			STM7-VI
Power cable			UYCP
Dimensions (W x D x H) mm			606 x 762 x 811	804 x 1024 x 844
Weight (kg)			159 kg	284 kg
Power consumption			00-120/220-240V 50/60Hz 0.6A/0.35A	100-120/220-240V 50/60Hz 0.6A/0.35A

*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.

OPTION

Objectives	Measurement objectives	MM6-OB series (1X /3X /5X /10X)
Focus navigator	Focus navigator unit	STM7-FN
Focus navigator	Green LED unit	MM6-ILG
Autofocus	Autofocus unit	STM7-AF
DIC	U-DICR DIC slider for reflected light	U-DICR
Software/Camera*1	Measurement Support Software	STM7-BSW
Camera	Digital camera Low	STM7-CU
	Digital camera Middle	DP23-CU
	Digital camera High	DP28-CU
TV adapter	C-mount camera port tube with 0.5X lens	U-TV0.5XC-3
TV adapter	C-mount camera port tube with 0.35X lens	U-TV0.35XC-2
Rotatable stage	For 100 x 100 mm	STM7-RS100
	For 200 x 200 mm	STM7-RS200
	For 300 x 300 mm	STM7-RS300
ND filter	ND filter (Transmittance 6%)	U-25ND6
ND filter	ND filter (Transmittance 25%)	U-25ND25
DIC	DIC/Polarizer	U-PO3
DIC	DIC/Analyzer	U-AN360-3
Software	MIA, EFI optional software	STM7-ASW-ME
Foot switch		STM7-FS
Power supply unit		MM6-ILPS-2
Stage micrometer		OB-M/OB-MM

*1 Supported cameras vary depend on the version of STM7-BSW.
Ver.1.3.3 or earlier: STM7-CU
Ver.1.4.1 or later: DP23/DP28

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